Transmission electron microscopy (TEM) utilises a beam of electrons to transmit through an ultra thin specimen. The interaction between the transmitting electrons and the specimen leads to the generation of several types of signals regarding structural and chemical characteristics of the specimen material.
TEM is capable of performing multiple analyses in micro/nano-scale volumes: observing structural features as small as a single column of atoms, determining crystalline structure of nano/micro-scale objects, and determining chemical compositions as well as chemical bonding structure.
At SMIC, transmission electron microscopy capabilities are provided by the Thermo Scientific Talos F200i (S)TEM, an advanced and versatile instrument designed for detailed materials characterisation. The Thermo Scientific Talos F200i (S)TEM is a 20-200 kV field-emission scanning and transmission electron microscope designed to deliver high performance and productivity across a wide range of materials science and semiconductor analysis applications. With its flexible objective lens gap and highly reproducible electron column, the Talos F200i enables high resolution 2D and 3D characterisation, in situ observation of dynamic processes, electron diffraction studies and detailed compositional analysis.
